The Digital Micromirror Device— A Micro-Optical Electromechanical Device for Display Applications

Mignardi, Michael A., Texas Instruments Inc.; Gale, Richard O., Texas Tech Univ.; Dawson, David; Smith, Jack C., Raytheon EO Innovations

doi:10.1117/3.2265068.ch4

Book: MEMS and MOEMS Technology and Applications

Editor(s): Prosenjit Rai-Choudhury

Author(s): Michael Mignardi, Richard Gale, David Dawson, Jack Smith

Published: 2000

https://doi.org/10.1117/3.2265068.ch4

Author Affiliations +

Abstract

Texas Instruments has developed a range of projectors using Digital Light Processing (DLP) technology. DLP is a reflective and truly digital projection/display technology in full-scale commercial production. DLP has enabled the development of XGA (Extended Graphics Adapter) resolution ultraportable (i.e., <10lbs.) projectors. There have been dramatic leaps since the first DLP-based projectors entered the market in 1996. The Digital Micromirror Device (DMD) is the heart of DLP technology. The DMD is a semiconductor-based array of fast, reflective digital light switches that precisely controls a light source using a binary pulse width modulation technique. This device is a unique combination of optical, mechanical, and electrical systems. Built on standard CMOS technology base wafers, the DMD mirror "super structure" provides an all-digital display solution capable of high brightness, high contrast, and high reliability.