MOEMS: Micro-Opto-Electro-Mechanical Systems
Editor(s): Manouchehr E. Motamedi
Published: 2005
DOI: 10.1117/3.2265061
PDF ISBN: 9781510607873 | Print ISBN: 9780819450210
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CHAPTER 1.
CHAPTER 2.
Spahn, Olga B. , Mani, Seethambal S.
CHAPTER 3.
CHAPTER 4.
Que, Long, Louisiana Tech Univ. , Gianchandani, Yogesh B., Univ. of Michigan
CHAPTER 5.
CHAPTER 6.
Goring, Rolf
CHAPTER 7.
CHAPTER 8.
CHAPTER 9.
CHAPTER 10.
Hamza, Ridha, SoftMEMS , Nachtergaele, Philippe, Open Engineering S.A. , Karam, Jean Michel, MEMSCAP, S.A.
CHAPTER 11.
Malshe, Ajay P., Univ. of Arkansas , O'Connor, Patrick
CHAPTER 12.
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