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Chapter 12:
Published Scatter Standards
Abstract

It's not over until the paperwork is done. - Unknown.

The purpose of publishing standards is to give industrial communities an accepted and universal way to communicate requirements for instrumentation and measurements. Standards are a sort of language that industry competitors and collaborators can use to reduce the amount of complex communication required to order, test, and accept equipment and to easily communicate measurements. For example, when purchasing an optical profilometer that calculates the surface PSD of the measured sample, it would be nice to know that it is found by the standard calculation that was outlined in Section 2.2.1 and follows SEMI Standard MF 1811 described below. When using a commercial TIS system, it is useful to know that the instrument is SEMI MF 1048 or ISO 13696 compliant and that it does not use the incorrect definitions that have crept into some stray-light literature and (very unfortunately) software products.

Standards are arrived at by committees composed of volunteers from different industry segments. For example, in the semiconductor industry, a meeting might have several representatives from manufacturing companies of wafers, wafer inspection equipment, and semiconductor devices. The room is full of customers and suppliers - many of whom compete with each other. Outside of the meeting rooms, a lot of business might take place in private conversations. Inside the room, conversation promoting products is prohibited, as the group struggles to produce a consensus standard. Passage of a document requires that it receive no negative votes that are found to be technically persuasive. Negative votes must be found persuasive (or nonpersuasive) in both the task force creating the document and in supervising committee. The process can be slow.

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CHAPTER 12
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