Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Translator Disclaimer
Chapter 10:
Immersion Lithography and the Limits of Optical Lithography
It has long been known that resolution in optical microscopy can be enhanced by immersing microscope objective lenses in a liquid that has an index of refraction greater than 1.0. This is not something that can be accomplished by using optics that have been designed for imaging in air, but requires lenses that have been designed specifically for operation using an immersion fluid with a well-defined index of refraction. Nevertheless, such optics have been exploited successfully in optical microscopy for over a century.
Online access to SPIE eBooks is limited to subscribing institutions.

Back to Top