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Chapter 6:
Overlay
Book: Principles of Lithography, Fourth Edition
Author(s): Harry J. Levinson
Published: 2019
https://doi.org/10.1117/3.2525393.ch6
Abstract
Integrated circuits are built through a sequence of patterning steps. If the transistor is going to be contacted electrically so that it functions properly, the contact to the gate must physically connect to the gate and not short electrically to the source or drain. This requires that the pattern created at the contact-masking step be placed correctly on top of the pre-existing transistor structures. This placement does not need to be perfect, but it must be within certain tolerances. Transistors will function so long as the contacts have sufficient overlap with the appropriate parts of the transistor and do not contact the parts of the transistor from which they are supposed to be electrically isolated.
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CHAPTER 6
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