Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Chapter 2:
Optical Pattern Formation
Abstract
2.1 The problem of imaging The basic problem of imaging is shown in Fig. 2.1. Light from an illumination source passes through a photomask, which defines the patterns. The simple photomask illustrated here consists of two types of complementary areas—one type that is opaque, while the other is transparent. In this example, the transparent (or “clear”) area is a long space of uniform width, and the optical and resist profiles shown in Fig. 2.1 are cross sections for this geometry. Some of the light that passes through the mask continues through a lens, which projects an image of the mask pattern onto a wafer.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 2


SHARE
Back to Top