Access to SPIE eBooks is limited to subscribing institutions. Access is not available as part of an individual subscription. However, books can be purchased on SPIE.Org
Chapter 1:
Overview of Lithography
Author(s): Harry J. Levinson
Published: 2011
DOI: 10.1117/3.865363.ch1
The patterns of integrated circuits are created on wafers by lithography. The steps of this critical manufacturing process are listed in Table 1.1. Each step will be discussed at length in later chapters of this book, but a brief description of each will be given here. Most of this book is devoted to photolithography, where optical methods are used to transfer the circuit patterns from master images - called masks or reticles - to the wafers. Photolithography is the method used for patterning nearly all integrated circuits fabricated today.
Online access to SPIE eBooks is limited to subscribing institutions.

Back to Top