Access to the requested content is limited to institutions that have purchased or subscribe to SPIE eBooks.
You are receiving this notice because your organization may not have SPIE eBooks access.*
*Shibboleth/Open Athens users─please
sign in
to access your institution's subscriptions.
To obtain this item, you may purchase the complete book in print or electronic format on
SPIE.org.
Abstract
The main goal of a multilayer coating for the XUV region is to enhance reflectivities in regions of wavelengths and angles of incidence where single surfaces with useful reflectivities are not available and achieve useful reflectivities despite the fact that all materials are absorbing. In wavelength regions where absorption-free materials with different refractive indices are available, the âquarter-wave stackâ is the most efficient design to produce high-reflectivity mirrors because all boundaries add in phase to the reflected wave in this design. Early studies of the influence of absorption on the performance of the quarter-wave stack showed, however, that the performance of this design deteriorates very fast when one of the coating materials becomes slightly absorbing [1]. Efforts to extend multilayer coating technology from the visible to the UV region concentrated on the search for thin film materials that could be made absorption-free. It was also clear that these efforts were doomed to failure for wavelengths below λ = 1100 à , where all materials are strong absorbers.
Online access to SPIE eBooks is limited to subscribing institutions.