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Abstract
The personal anecdote presented as an Author’s Note on p. 115 demonstrates how far we have come in advancing our understanding of optical fabrication and metrology in the past three decades. In particular, the realization of the importance of mid-spatial-frequency optical fabrication errors was crucial to the understanding and acceptance of the surface power spectral density (PSD) as an all-encompassing function in the characterization of optical fabrication errors, and the associated image degradation, in high-quality optical systems. By the late 1990s both ASTM and SEMI standards had been developed for BRDF measurement techniques and for the estimation of the surface PSD from surface profile data.
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CHAPTER 8
19 PAGES


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