MOEMS: Micro-Opto-Electro-Mechanical Systems

Published: 2005

PDF ISBN: 9781510607873 | Print ISBN: 9780819450210

DESCRIPTION

"This is a great compendium of fundamentals, research, and applications in the rapidly growing area of optical microsystems. Every engineer working on MOEMS should have this on his or her bookshelf." --Douglas R. Sparks, Ph.D., Executive Vice President, Integrated Sensing Systems Inc. (ISSYS)

This book introduces the exciting and fast-moving field of MOEMS to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS that will enable them to conduct future research in the field. Born from the relatively new fields of MEMS and micro-optics, MOEMS are proving to be an attractive and low-cost solution to a range of device problems requiring high optical functionality and high optical performance. MOEMS solutions include optical devices for telecommunication, sensing, and mobile systems such as v-grooves, gratings, shutters, scanners, filters, micromirrors, switches, alignment aids, lens arrays, and hermetic wafer-scale optical packaging. An international team of leading researchers contributed to this book, and it presents examples and problems employing cutting-edge MOEM devices. It will inspire researchers to further advance the design, fabrication, and analysis of MOEM systems.

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EXCERPT

The integration of micro-optics and micro-electro-mechanical systems (MEMS) has created a new class of microsystems, termed micro-opto-electro-mechanical systems (MOEMS) that are capable of unprecedented levels of performance and functionality. Born from the relatively new fields of micro-optics and MEMS, MOEMS are proving to be an attractive solution to a range of optical problems requiring high functionality, high performance, and low cost. In this early stage of MOEMS, the majority of devices demonstrated are miniaturized versions of macroscopic systems, leveraging the low-cost manufacturing technologies of integrated circuits. In the near future, it is expected that entirely new classes of microsystems will emerge that do not have a macroscopic counterpart and are fully enabled by MOEMS. It could be argued that the future development of high-density optical switch matrixes is an example of this trend. The purpose of this book is to introduce this exciting and fast-moving field to graduate students, scientists, and engineers by providing a foundation of both micro-optics and MEMS to enable future research in the field of MOEMS. This book is not intended to be a summary of leading-edge research results, although state-of-the-art devices are used as examples throughout the text and chapter problems. The intent is to cover the topics in sufficient detail as to provide researchers with the foundation to proceed in the design, fabrication, and analysis of state-of-the-art MOEMS. The book begins with a short history of integrated circuits and the development of micromachining. Then, the reader is given an overview of MEMS and microoptics and the potential for merging the two fields. Following the introduction, the book is divided into four distinct parts. The first part of this book provides the necessary foundation in MEMS technology covering micromachining (Chapter 2) and micro-optics (Chapter 3). The second part of the book describes microfabricated sensors and actuators (Chapter 4), which hold promise for use in MOEMS, and micro-optical components and testing (Chapter 5), which serve as the building blocks of integrated microsystems. The third part of the book describes several major application areas for MOEMS from the perspective of device design and fabrication as well as systems integration. Since the list of applications for MOEMS is growing on a daily basis, we have focused on four major areas: fiber-optics (Chapter 6), optical scanning (Chapter 7), display and imaging (Chapter 8), and adaptive optics (Chapter 9). Finally, in the last part of the book we discuss the recent advances in MOEMS CAD and simulation (Chapter 10), in major packaging issues (Chapter 11), and in material properties (Chapter 12). M. E. Motamedi January 2005