How to Protect Reticles from Electrostatic Damage

Author(s): Gavin C. Rider

Published: 2018

PDF ISBN: 9781510623071

DESCRIPTION

This Spotlight discusses the reticle electrostatic damage (ESD) phenomenon, how it adversely affects semiconductor production, and how the problem has been traditionally addressed. It explains why reticles are uniquely sensitive to the effects of electric fields. A case is made for minimizing the risk of ESD and the corresponding yield loss by moving away from grounding (equipotential bonding), which is proven to increase the field induction risk, and the use of static dissipative plastics to construct reticle pods and boxes.