Prototyping Micro- and Nano-Optics with Focused Ion Beam Lithography
Author Affiliations +
Abstract
The ability to manipulate matter at micro- and nanoscales underlies the technologies that define our daily life at the beginning of the 21st century. Advanced materials provide a foundation for other technologies to build upon, whereas microelectronics and photonics provide computational power and high-speed communication, respectively. This ability to control and engineer matter at the smallest scale also opens up new frontiers on the fundamental levels of physics, chemistry, and life sciences, rendering micro/nanotechnologies an exciting playground where well-established borders between distinct fields become fuzzy.
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CITATIONS
Cited by 3 scholarly publications.
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KEYWORDS
Ions

Lithography

Prototyping

Nano optics

Computer generated holography

Scanning electron microscopy

Etching

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