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The Escalating Design Complexity of Sub-Resolution Scaling
Book: Design Technology Co-Optimization in the Era of Sub-Resolution IC Scaling
Author(s): Lars W. Liebmann, Lawrence Pileggi, Kaushik Vaidyanathan
Published: 2016
https://doi.org/10.1117/3.2217861.ch1
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Abstract
To set the stage for a discussion about the increasing design impact of subresolution patterning, Fig. 1.1 illustrates the steady decline in the k1 factor over ten technology nodes.
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CHAPTER 1
 31 PAGES
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KEYWORDS
Optical lithography
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