Step-by-step View of the Lithographic Process

doi:10.1117/3.2265072.ch5

Book: Diazonaphthoquinone-based Resists

Author(s): Ralph R. Dammel

Published: 1993

https://doi.org/10.1117/3.2265072.ch5

Author Affiliations +

Abstract

Contrary to what one might think, the lithographic process does not start with coating a wafer with photoresist. Instead, it starts with getting a photoresist bottle to and into a cleanroom. The logistics of this operation demand that a photoresit have a shelf life of at least 6 months; actually, most commercial photoresists are specified for more than that period. What can happen to a photoresist during the time between bottling and end use?