CONFERENCE PROCEEDINGS
Advanced Search >
Home > eBooks > Diazonaphthoquinone-based Resists > DNQ/Novolak Interactions
Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Chapter 4:
DNQ/Novolak Interactions
Book: Diazonaphthoquinone-based Resists
Author(s): Ralph R. Dammel
Published: 1993
https://doi.org/10.1117/3.2265072.ch4
Abstract
The hydrophilic diffusion channel model as discussed in section 3.7 and 3.8 explains the known facts of novolak dissolution very nicely: the disproportionate response of the novolak dissolution rate to the addition of a small amount of DNQ is due to a blocking of the diffusion channels by the inhibitor. A small amount of inhibitor may thus cause a large reduction in dissolution rate by blocking some diffusion channels, and thus lowering their total number below some critical value. PHS with its much higher density of diffusion channels would therefore be practically impossible to inhibit, as is indeed observed.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 4
 27 PAGES
DOWNLOAD PDF + SAVE TO MY LIBRARY
SHARE
BUY PRINT BOOK
ON SPIE.ORG
< Previous Chapter
|
Next Chapter >
Subscribe to Digital Library
Receive Email Alerts on Newly Released Titles
Back to Top