Access to eBooks is limited to institutions that have purchased
or currently subscribe to the SPIE eBooks program. eBooks are not
available via an individual subscription. SPIE books (print and
digital) may be purchased individually on
Contact your librarian to recommend SPIE eBooks for your organization.
Chapter 5: Step-by-step View of the Lithographic Process
Contrary to what one might think, the lithographic process does not start with coating a wafer with photoresist. Instead, it starts with getting a photoresist bottle to and into a cleanroom. The logistics of this operation demand that a photoresit have a shelf life of at least 6 months; actually, most commercial photoresists are specified for more than that period. What can happen to a photoresist during the time between bottling and end use?
Online access to SPIE eBooks is limited to subscribing institutions.