Backscattered and Secondary-Electron Emission

Author(s): Ludwig Reimer

Published: 1993

https://doi.org/10.1117/3.2265074.ch4

Abstract

The backscattering coefficient η and the secondary-electron yield δ depend on electron energy E, atomic number Z, and surface tilt angle ϕ, and show characteristic energy and angular distributions that are important to the discussion of the image formation when using the signal of backscattered and secondary electrons.