Access to SPIE eBooks is limited to subscribing institutions. Access is not available as part of an individual subscription. However, books can be purchased on SPIE.Org
Chapter 3:
Electron Scattering and Diffusion
Author(s): Ludwig Reimer
Published: 1993
DOI: 10.1117/3.2265074.ch3
Elastic and inelastic scattering at single atoms and the excitation of electrons in solids are the basic processes influencing the range of electrons, the depth distribution of ionization, and the emission of secondary and backscattered electrons. These scattering processes can be used in Monte Carlo simulations of electron trajectories for comparing the results with experiments and for calculating angular, energy, and spatial distributions of backscattered and secondary electrons, for example, which cannot be measured without a larger experimental setup.
Online access to SPIE eBooks is limited to subscribing institutions.

Back to Top