Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Chapter 4:
Backscattered and Secondary-Electron Emission
Abstract
The backscattering coefficient η and the secondary-electron yield δ depend on electron energy E, atomic number Z, and surface tilt angle ϕ, and show characteristic energy and angular distributions that are important to the discussion of the image formation when using the signal of backscattered and secondary electrons.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 4
14 PAGES


SHARE
Back to Top