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Appendix
Book: Introduction to Metrology Applications in IC Manufacturing
Author(s): Eric Solecky, Alok Vaid, Bo Su
Published: 2015
https://doi.org/10.1117/3.2197207.ap1
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Abstract
Appendix
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CHAPTER 1
 2 PAGES
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KEYWORDS
Photoresist materials
Contamination
Scanning helium ion microscopy
Ion beams
Oxides
Scanning electron microscopy
Metrology
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