Perspectives on Future Challenges and Considerations

Author(s): Eric Solecky, Alok Vaid, Bo Su

Published: 2015

https://doi.org/10.1117/3.2197207.ch10

Abstract

This final chapter concludes with some suggestions for future metrology toolset improvements and other themes that require future consideration. Metrology has changed significantly in the past 15 years and will continue to change. It is hoped that these suggestions will become mainstream or at least motivate readers to pursue new ideas that drive positive changes.