Simulator Accuracy Tests

Book: Optical Imaging in Projection Microlithography

Author(s): Alfred K. K. Wong

Published: 2005

https://doi.org/10.1117/3.612961.ap4

Abstract

It is often desirable to assess the accuracy of an imaging simulation program. A test suite for fidelity evaluation should be comprehensive, and the cases should admit analytic solutions. In this chapter we construct a set of tests, based on the physics encapsulated in Eq. (8.1), which can be used to gauge the accuracy of simulation programs.