Numerical Computation

doi:10.1117/3.612961.ch8

Book: Optical Imaging in Projection Microlithography

Author(s): Alfred K. K. Wong

Published: 2005

https://doi.org/10.1117/3.612961.ch8

Author Affiliations +

Abstract

The theoretical developments in the last chapters have provided us with equations that describe optical imaging in photolithography. With these equations, images of objects can be computed in lieu of carrying out exposures. The possibility to simulate allows us to harness the power of affordable computers to predict images of object patterns, and to optimize the object and exposure configuration given a desired image. In this chapter we discuss common numerical formulations for imaging simulation.