Oblique Rays

doi:10.1117/3.612961.ch6

Oblique Rays

Book: Optical Imaging in Projection Microlithography

Author(s): Alfred K. K. Wong

Published: 2005

https://doi.org/10.1117/3.612961.ch6

Author Affiliations +

Abstract

We have, so far, treated light as a scalar quantity. Such treatment is adequate for light traveling at shallow angles with respect to the optic axis. At larger angles we need to consider the vector nature of light vibrations. Our investigations are concerned with the electric field vector only, since, as Otto Wiener demonstrated in his 1890 experiment, photochemical action is related to the electric rather than the magnetic vector.