Access to eBooks is limited to institutions that have purchased
or currently subscribe to the SPIE eBooks program. eBooks are not
available via an individual subscription. SPIE books (print and
digital) may be purchased individually on
Contact your librarian to recommend SPIE eBooks for your organization.
Manufacturing methods and tolerances have continually improved during recent years. Applications ranging from cooling channels and circuit boards to ink jet print heads are using holes that can be well under a millimeter in size. To keep up with smaller features and tighter tolerances, measurement tools have also had to adapt. This chapter reviews tests on potential optical metrology methods as applied to submillimeter-size holes. A focus-based method provided the most promise for detailed inner-profile mapping of small holes.
Online access to SPIE eBooks is limited to subscribing institutions.