Access to eBooks is limited to institutions that have purchased or currently subscribe to the SPIE eBooks program. eBooks are not available via an individual subscription. SPIE books (print and digital) may be purchased individually on SPIE.Org.

Contact your librarian to recommend SPIE eBooks for your organization.
Chapter 4:
Focus-based Optical Metrology
Abstract
A method of optical metrology that has seen wide use in recent years employs focus changes in an optical system to provide a means of measurement. A simple form of this method is used in autofocus cameras.
Online access to SPIE eBooks is limited to subscribing institutions.
CHAPTER 4
28 PAGES


SHARE
Back to Top