Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Miriam Sortland; Jodi Hotalen; Ryan Del Re; James Passarelli; Michael Murphy; Tero S. Kulmala; Yasin Ekinci; Mark Neisser; Daniel A. Freedman; Robert L. Brainard

doi:10.1117/1.JMM.14.4.043511

24 December 2015 Platinum and palladium oxalates: positive-tone extreme ultraviolet resists

Miriam Sortland, Jodi Hotalen, Ryan Del Re, James Passarelli, Michael Murphy, Tero S. Kulmala, Yasin Ekinci, Mark Neisser, Daniel A. Freedman, Robert L. Brainard

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 14, Issue 4, 043511 (December 2015). https://doi.org/10.1117/1.JMM.14.4.043511

Abstract

Here, we present platinum and palladium mononuclear complexes with EUV photosensitivity and lithographic performance. Many platinum and palladium complexes show little or no EUV sensitivity; however, we have found that metal carbonates and metal oxalates (L₂M(CO₃) and L₂M(C₂O₄); M=Pt or Pd) are sensitive to EUV. The metal carbonates give negative-tone behavior. The most interesting result is that the metal oxalates give the first positive-tone EUV resists based on mononuclear organometallic compounds. In particular, (dppm)Pd(C₂O₄) (dppm=1,1-bis(diphenylphosphino)methane) (23) prints 30-nm dense lines with E_size of 50 mJ/cm². Derivatives of (23) were synthesized to explore the relationship between the core metal and the resist sensitivity. The study showed that palladium-based resists are more sensitive than platinum-based resists. The photoreaction has been investigated for two of our most promising resists, (dppm)Pd(C₂O₄) (23) and (Ph₂EtP)₂PdC₂O₄ (27). Our experiments suggest the loss of CO₂ and the formation of a zerovalent L₄Pd complex upon exposure to light. We have identified dppm₂Pd(δ(P)23.6) as the main photoproduct for (23) and (Ph₂EtP)₄Pd (δ(P)32.7) as the main photoproduct for (27).

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Miriam Sortland, Jodi Hotalen, Ryan Del Re, James Passarelli, Michael Murphy, Tero S. Kulmala, Yasin Ekinci, Mark Neisser, Daniel A. Freedman, and Robert L. Brainard "Platinum and palladium oxalates: positive-tone extreme ultraviolet resists," Journal of Micro/Nanolithography, MEMS, and MOEMS 14(4), 043511 (24 December 2015). https://doi.org/10.1117/1.JMM.14.4.043511

Published: 24 December 2015

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