Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer

Deng-Huei Hwang; Kan-Ping Chin; Yi-Chung Lo; Wensyang Hsu

doi:10.1117/1.2037070

1 July 2005 Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer

Deng-Huei Hwang, Kan-Ping Chin, Yi-Chung Lo, Wensyang Hsu

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 3, 033009 (July 2005). https://doi.org/10.1117/1.2037070

Abstract

An accelerometer with concise structure having a resonant microbeam to measure 2-D acceleration is proposed. This structure is configured with a central proof mass suspended by four symmetrical and orthogonal high-aspect-ratio (HAR) microbeams. This dual-axis design is able to decouple a two-axis signal from a 2-D acceleration. An analytical model relating the linear relationship between the acceleration and the associated resonant frequency shift of microbeam is derived, and a finite element analysis (FEA) is also performed to confirm this model. The FEA result also shows that there is little cross talk between x and y directions of measurement, meaning that this structure is able to decouple a planar 2-D acceleration into two independent acceleration components, and therefore the 1-D analytical model can be used to evaluate the 2-D acceleration on the x-y plane. In addition, the model is verified by testing results of one conventional dual-axis natural frequency shifted microaccelerometer (DFSM). The simulation result also shows that the sensitivity of the proposed HAR accelerometer is triple that of a conventional DFSM.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Deng-Huei Hwang, Kan-Ping Chin, Yi-Chung Lo, and Wensyang Hsu "Structure design of a 2-D high-aspect-ratio resonant microbeam accelerometer," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(3), 033009 (1 July 2005). https://doi.org/10.1117/1.2037070

Published: 1 July 2005

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available