Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Christophe Gorecki; Michal Józwik; Leszek A. Salbut

doi:10.1117/1.2110027

1 October 2005 Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS

Christophe Gorecki, Michal Józwik, Leszek A. Salbut

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 4, Issue 4, 041402 (October 2005). https://doi.org/10.1117/1.2110027

Abstract

We develop a multifunctional interferometric platform for testing MEMS/MOEMS, measuring 3-D out-of-plane deflections and providing both material properties and motion behavior of microdevices. Specific metrology procedures are demonstrated to determine respectively the residual stress of silicon membranes compressively prestressed by SiO_xN_y plasma-enhanced chemical vapor deposition (PECVD), the vibration modes of PZT microactuators, as well as the expertise of scratch drive actuators.

©(2005) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Christophe Gorecki, Michal Józwik, and Leszek A. Salbut "Multifunctional interferometric platform for on-chip testing the micromechanical properties of MEMS/MOEMS," Journal of Micro/Nanolithography, MEMS, and MOEMS 4(4), 041402 (1 October 2005). https://doi.org/10.1117/1.2110027

Published: 1 October 2005

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