Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass

Jagannath Nayak; Srinivas Talabattula; Ananth Selvarajan; D. V. K. Sastry

doi:10.1117/1.2397045

1 October 2006 Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass

Jagannath Nayak, Srinivas Talabattula, Ananth Selvarajan, D. V. K. Sastry

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 5, Issue 4, 043012 (October 2006). https://doi.org/10.1117/1.2397045

Abstract

Micro-opto-electro-mechanical (MOEM) accelerometers using principle of optical coupling between two waveguide structures is proposed. It consists of an antiresonant reflecting optical waveguide structure combined with a cantilever beam. Under acceleration, the output waveguide optical power changes, which is a function of acceleration. The mathematical model of the mechanical sensing element in terms of proof mass, damping, and spring constant is formulated. Here, different aspects such as beam deflection, bending stress, and breakdown acceleration are incorporated into the formulation. Based on the analysis, the optimum mechanical structure for intensity modulated MOEM accelerometers are designed. We report for a typical uniform cantiliver beam of type I (3 mm×3 mm×0.38 μm) accelerometer, mechanical sensitivity of 0.15 μm/g, minimum detectable acceleration of 4.7 μg/√Hz at an optimum power of 500 μW, range of ±25 g, a bandwidth of 1.59 kHz, breakdown acceleration of 5.1×10⁴ g and cross-axis sensitivity of 0.001%. The results in the case of nonuinform beam cantiliver accelerations are sensitivity of 2.15 μm/g, minimum detectable acceleration of 0.27 μg/√Hz range of ±1.8 g, bandwidth of 0.411 kHz, breakdown acceleration of 2987 g and cross-axis sensitivity of 0.001%.

©(2006) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Jagannath Nayak, Srinivas Talabattula, Ananth Selvarajan, and D. V. K. Sastry "Design and analysis of an intensity modulated micro-opto-electro-mechanical accelerometer based on nonuniform cantilever beam proof mass," Journal of Micro/Nanolithography, MEMS, and MOEMS 5(4), 043012 (1 October 2006). https://doi.org/10.1117/1.2397045

Published: 1 October 2006

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available