Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology

Satoshi Amaya; Dzung Viet Dao; Susumu Sugiyama

doi:10.1117/1.3268366

1 October 2009 Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology

Satoshi Amaya, Dzung Viet Dao, Susumu Sugiyama

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 8, Issue 4, 043065 (October 2009). https://doi.org/10.1117/1.3268366

Abstract

We report the fabrication and evaluation of a PMMA electrostatic comb-drive microactuator using hot embossing and ultra-precision cutting technology. First, a two-step silicon mold is fabricated by bulk micromachining technology. Next, comb-drive microactuator structures are formed on a PMMA plate by hot embossing. Both finger width and gap between fingers are 5 µm, and finger thickness is larger than 70 µm. Then, the PMMA layer that remained after hot embossing is removed by ultra-precision cutting to release the movable parts. Last, the device is coated with a gold layer for the electrode. The PMMA comb-drive microactuator has been tested successfully.

©(2009) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Satoshi Amaya, Dzung Viet Dao, and Susumu Sugiyama "Development of polymer electrostatic comb-drive actuator using hot embossing and ultraprecision cutting technology," Journal of Micro/Nanolithography, MEMS, and MOEMS 8(4), 043065 (1 October 2009). https://doi.org/10.1117/1.3268366

Published: 1 October 2009

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