Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Ching-Liang Wei; Ying-Chung Chen; Kuo-Sheng Kao; Kuang-Tsung Wu; Da-Long Cheng; Po-Tsung Hsieh

doi:10.1117/1.3459938

1 July 2010 Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications

Ching-Liang Wei, Ying-Chung Chen, Kuo-Sheng Kao, Kuang-Tsung Wu, Da-Long Cheng, Po-Tsung Hsieh

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 9, Issue 3, 031009 (July 2010). https://doi.org/10.1117/1.3459938

Abstract

A UV sensor composed of a surface acoustic wave (SAW) device and a high-frequency amplifier was constructed using a Colpitts oscillator circuit. Zinc oxide (ZnO) films of SAW devices were prepared on lithium niobate substrates with various deposition temperatures to investigate their effect on the sensitivity of UV sensors. Larger grain sizes and a better chemical composition of the ZnO films were obtained at high-deposition temperatures rather than at low-deposition temperatures. An extreme frequency shift of 264 kHz and sensitivity of 0.21 kHz/(µW/cm2) were obtained for the ZnO-based SAW oscillator at the deposition temperature of 400 °C.

©(2010) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Ching-Liang Wei, Ying-Chung Chen, Kuo-Sheng Kao, Kuang-Tsung Wu, Da-Long Cheng, and Po-Tsung Hsieh "Characterization of ZnO films of surface acoustic-wave oscillators for ultraviolet sensing applications," Journal of Micro/Nanolithography, MEMS, and MOEMS 9(3), 031009 (1 July 2010). https://doi.org/10.1117/1.3459938

Published: 1 July 2010

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