Commentary: Nano- and micromachining using laser plasma soft X-rays

Tetsuya Makimura; Shuichi Torii; Hiroyuki Niino; Kouichi Murakami

doi:10.1117/1.3488615

1 August 2010 Commentary: Nano- and micromachining using laser plasma soft X-rays

Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino, Kouichi Murakami

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Journal of Nanophotonics, Vol. 4, Issue 1, 040305 (August 2010). https://doi.org/10.1117/1.3488615

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Tetsuya Makimura, Shuichi Torii, Hiroyuki Niino, and Kouichi Murakami "Commentary: Nano- and micromachining using laser plasma soft X-rays," Journal of Nanophotonics 4(1), 040305 (1 August 2010). https://doi.org/10.1117/1.3488615

Published: 1 August 2010

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KEYWORDS

X-rays

Silica

Glasses

Micromachining

Plasma

Polymethylmethacrylate

X-ray lasers

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