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12 February 2020 Direct current magnetron coating chamber characterization directed toward the efficient development of broadband x-ray optic multilayer coatings
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Abstract

A direct current (DC) magnetron sputtering system has been developed at NASA Marshall Space Flight Center for depositing broadband x-ray optic multilayer coatings. The system has the capability to house up to four, 2-in.-diameter direct-cooled DC magnetron cathodes. The 2-in.-diameter cathodes facilitate low-cost, early stage research and development of various types of optical coatings. Despite the small target diameter, good coating uniformity on 4-in.-diameter substrates is demonstrated. Sources of both systematic and random error in the deposition of depth-graded multilayer coatings were identified and compensated for, resulting in the ability to deposit coating that required ∼7.5  h of total deposition time. Final verification of the system was concluded with the deposition of an NuSTAR W/Si depth-graded multilayer coating design (flight recipe 10).

© 2020 Society of Photo-Optical Instrumentation Engineers (SPIE) 2329-4124/2020/$28.00 © 2020 SPIE
Danielle N. Gurgew, David M. Broadway, and Brian D. Ramsey "Direct current magnetron coating chamber characterization directed toward the efficient development of broadband x-ray optic multilayer coatings," Journal of Astronomical Telescopes, Instruments, and Systems 6(1), 015004 (12 February 2020). https://doi.org/10.1117/1.JATIS.6.1.015004
Received: 23 September 2019; Accepted: 21 January 2020; Published: 12 February 2020
JOURNAL ARTICLE
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