High-accuracy aerial image measurement for electron beam projection lithography

Takehisa Yahiro; Noriyuki Hirayanagi; Takeshi Irita; Hiroyasu Shimizu; Kazuaki Suzuki

doi:10.1117/1.1451082

1 July 2002 High-accuracy aerial image measurement for electron beam projection lithography

Takehisa Yahiro, Noriyuki Hirayanagi, Takeshi Irita, Hiroyasu Shimizu, Kazuaki Suzuki

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 1, Issue 2, (July 2002). https://doi.org/10.1117/1.1451082

Abstract

A direct means of measuring the image blur of electron beam projection lithography (EPL) tools is described. We developed an aerial image sensor using a Si membrane knife-edge and a transmitted electron detection technique. The aerial image sensor is designed to increase signal amplitude and signal contrast in order to yield a large signal to noise ratio even under a low beam current density condition. The image blur can be quantified accurate to a few nanometers because the measurement error due to the sensor is extremely small. The aerial image sensor was installed in Nikon's electron beam projection experimental column and was evaluated. The measured image blur, defined as the distance between the 12% and 88% points of the beam edge profile, under the optimum condition was 13 nm, and the measurement repeatability was 3 nm (3 sigma). The application of this technique to a system calibration is demonstrated. Focus and astigmatism were measured and the optimum settings of focus coils and stigmators were determined with excellent repeatability. The potential for this technique to provide an automated self-calibration system on EPL tools is clearly shown.

©(2002) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Takehisa Yahiro, Noriyuki Hirayanagi, Takeshi Irita, Hiroyasu Shimizu, and Kazuaki Suzuki "High-accuracy aerial image measurement for electron beam projection lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 1(2), (1 July 2002). https://doi.org/10.1117/1.1451082

Published: 1 July 2002

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available