1 July 2002 KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures
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Abstract
An investigation of the micromachining of trenches in lithium niobate (LiNbO3) using direct imaged 248 nm KrF excimer laser ablation is presented. Trenches 20 μm wide and 0.5-7.5 μm deep have been produced. These trenches are assessed and are deemed suitable for the machining of integrated electro-optic structures. Based on the characterized ablation conditions, trenches of high quality have been successfully fabricated on an X-cut optical modulator which is potentially important for the realization of efficient broadband optical intensity modulators.
Han-Woo Chong, Arnan Mitchell, Jason P. Hayes, Michael W. Austin, "KrF excimer laser trenching of X-cut LiNbO3 for realization of optimized optical modulator electrode structures," Journal of Micro/Nanolithography, MEMS, and MOEMS 1(2), (1 July 2002). http://dx.doi.org/10.1117/1.1484160
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KEYWORDS
Laser ablation

Electrodes

Modulators

Excimer lasers

Optical modulators

Pulsed laser operation

Waveguides

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