1 October 2011 How long is ten years?
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 10(4), 040101 (2011). doi:10.1117/1.3665263
Abstract
A message from the Editor-in-Chief.
Burn J. Lin, "How long is ten years?," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 040101 (1 October 2011). http://dx.doi.org/10.1117/1.3665263
Submission: Received ; Accepted
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KEYWORDS
Microopto electromechanical systems

Microelectromechanical systems

Manufacturing

Logic

Microfabrication

Immersion lithography

Semiconductors

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