Special Section Guest Editorial: Theory and Practice of MEMS, NEMS, and MOEMS

Yu-Cheng Lin

doi:10.1117/1.3567190

1 January 2011 Special Section Guest Editorial: Theory and Practice of MEMS, NEMS, and MOEMS

Yu-Cheng Lin

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 1, 011501 (January 2011). https://doi.org/10.1117/1.3567190

This PDF file contains the editorial “Special Section Guest Editorial: Theory and Practice of MEMS, NEMS, and MOEMS” for JM3 Vol. 10 Issue 1

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Yu-Cheng Lin "Special Section Guest Editorial: Theory and Practice of MEMS, NEMS, and MOEMS," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(1), 011501 (1 January 2011). https://doi.org/10.1117/1.3567190

Published: 1 January 2011

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KEYWORDS

Microelectromechanical systems

Microopto electromechanical systems

Nanoelectromechanical systems

Transducers

Actuators

Materials science

Nanolithography

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