Fabrication of submicron metallic grids with interference and phase-mask holography

Joong-Mok Park; Tae Geun Kim; Kristen P. Constant; Kai-Ming Ho

doi:10.1117/1.3541794

1 January 2011 Fabrication of submicron metallic grids with interference and phase-mask holography

Joong-Mok Park, Tae Geun Kim, Kristen P. Constant, Kai-Ming Ho

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 1, 013011 (January 2011). https://doi.org/10.1117/1.3541794

Abstract

Complex, submicron Cu metallic mesh nanostructures are made by electrochemical deposition using polymer templates made from photoresist. The polymer templates are fabricated with photoresist using two-beam interference holography and phase mask holography with three diffracted beams. Freestanding metallic mesh structures are made in two separate electrodepositions with perpendicular photoresist grating templates. Cu mesh square nanostructures having large (52.6%) open areas are also made by single electrodeposition with a photoresist template made with a phase mask. These structures have potential as electrodes in photonic devices.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

Citation Download Citation

Joong-Mok Park, Tae Geun Kim, Kristen P. Constant, and Kai-Ming Ho "Fabrication of submicron metallic grids with interference and phase-mask holography," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(1), 013011 (1 January 2011). https://doi.org/10.1117/1.3541794

Published: 1 January 2011

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available