1 January 2011 Fabrication of submicron metallic grids with interference and phase-mask holography
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 10(1), 013011 (2011). doi:10.1117/1.3541794
Complex, submicron Cu metallic mesh nanostructures are made by electrochemical deposition using polymer templates made from photoresist. The polymer templates are fabricated with photoresist using two-beam interference holography and phase mask holography with three diffracted beams. Freestanding metallic mesh structures are made in two separate electrodepositions with perpendicular photoresist grating templates. Cu mesh square nanostructures having large (52.6%) open areas are also made by single electrodeposition with a photoresist template made with a phase mask. These structures have potential as electrodes in photonic devices.
Joong-Mok Park, Tae Geun Kim, Kristen P. Constant, Kai-Ming Ho, "Fabrication of submicron metallic grids with interference and phase-mask holography," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(1), 013011 (1 January 2011). https://doi.org/10.1117/1.3541794

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