Fabrication of a needle-type pH sensor by selective electrodeposition

Woo-Hyuck Choi; Ian Papautsky

doi:10.1117/1.3580751

1 April 2011 Fabrication of a needle-type pH sensor by selective electrodeposition

Woo-Hyuck Choi, Ian Papautsky

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 10, Issue 2, 020501 (April 2011). https://doi.org/10.1117/1.3580751

Abstract

This manuscript reports on the development of a needle-type sensor for in situ on-site measurement of pH. Conventional pH microelectrode sensors are fabricated by pulling glass pipettes and applying ion-selective films at the tip. However, these sensors suffer from low fabrication yields and short sensor lifetime due to disruption or loss of the ion-selective membrane after repeated use. The developed needle-type sensor is fabricated by meniscus etching and takes advantage of the MEMS batch fabrication techniques. The sensor is based on the ion-selective properties of iridium oxide film, which was deposited at the sensor tip by electrodeposition. The sensor exhibited a Nernstian response with sensitivity of ∼62 mV/pH in the pH 2 to 12 range. The sensor also exhibited a fast 5 s response and a lifetime of ∼2 months when stored in a pH7 buffer solution, which is substantially longer than that of the conventional pulled-pipette sensors.

©(2011) Society of Photo-Optical Instrumentation Engineers (SPIE)

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Woo-Hyuck Choi and Ian Papautsky "Fabrication of a needle-type pH sensor by selective electrodeposition," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(2), 020501 (1 April 2011). https://doi.org/10.1117/1.3580751

Published: 1 April 2011

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KEYWORDS

Sensors

Glasses

Microelectromechanical systems

Electrodes

Gold

Iridium

Etching

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