1 July 2011 Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes
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Abstract
We have developed compact devices to control electrostatically driven resonant micromirrors with one and two axes. For stable oscillation with large amplitude, operation close to resonance must be ensured under varying environmental conditions. Our devices feature optical position sensing and driver electronics with closed loop control. In this contribution, we present in much detail the novel two-dimensional device and highlight specific aspects of this system.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Andreas Tortschanoff, Andreas Tortschanoff, Albert Frank, Albert Frank, Michael Wildenhain, Michael Wildenhain, Thilo Sandner, Thilo Sandner, Andreas Kenda, Andreas Kenda, } "Optical position encoding and phase control of an electrostatically driven two-dimensional MOEMS scanner at two resonant modes," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(3), 033006 (1 July 2011). https://doi.org/10.1117/1.3609230 . Submission:
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