1 October 2011 Lossless circuit layout image compression algorithm for maskless direct write lithography systems
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Abstract
The recent algorithm Corner is a transform-based technique to represent a circuit layout image for maskless direct write lithography systems. We improve the lossless circuit layout compression algorithm Corner so that 1. it requires fewer symbols during the corner transform, 2. it has a simpler and faster decoding process, while 3. it requires a similar amount of memory for the decoding process.
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Jeehong Yang, Serap A. Savari, "Lossless circuit layout image compression algorithm for maskless direct write lithography systems," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 043007 (1 October 2011). https://doi.org/10.1117/1.3644620 . Submission:
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