1 October 2011 Errata: Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects
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This PDF file contains the errata for “JM3 Vol. 10 Issue 04 Paper 3647513” for JM3 Vol. 10 Issue 04
© (2011) Society of Photo-Optical Instrumentation Engineers (SPIE)
Philip C. W. Ng, Philip C. W. Ng, Kuen-Yu Tsai, Kuen-Yu Tsai, Lawrence S. Melvin, Lawrence S. Melvin, } "Errata: Non-delta-chrome optical proximity correction methodology for process models with three-dimensional mask effects," Journal of Micro/Nanolithography, MEMS, and MOEMS 10(4), 049801 (1 October 2011). https://doi.org/10.1117/1.3647513 . Submission:
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