Special Section Guest Editorial: Dimensional Metrology with Atomic Force Microscopy

Ronald G. Dixson; Ndubuisi G. Orji

doi:10.1117/1.JMM.11.1.011001

24 February 2012 Dimensional Metrology with Atomic Force Microscopy

Ronald G. Dixson, Ndubuisi G. Orji

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 011001 (February 2012). https://doi.org/10.1117/1.JMM.11.1.011001

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Ronald G. Dixson and Ndubuisi G. Orji "Dimensional Metrology with Atomic Force Microscopy," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 011001 (24 February 2012). https://doi.org/10.1117/1.JMM.11.1.011001

Published: 24 February 2012

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KEYWORDS

Atomic force microscopy

Dimensional metrology

Metrology

Microscopy

Analytical research

Biological research

Cell biology

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