Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

Virpi Korpelainen; Jeremias Seppä; Antti Lassila

doi:10.1117/1.JMM.11.1.011002

28 February 2012 Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope

Virpi Korpelainen, Jeremias Seppä, Antti Lassila

Author Affiliations +

Journal of Micro/Nanolithography, MEMS, and MOEMS, Vol. 11, Issue 1, 011002 (February 2012). https://doi.org/10.1117/1.JMM.11.1.011002

Abstract

Gratings and step height standards are useful transfer standards for lateral and vertical length scale calibration of atomic force microscopes (AFMs). In order to have traceability to the SI-meter, the standards must have been calibrated prior to use. Metrological AFMs (MAFMs) with online laser interferometric position measurements are versatile instruments for the calibrations. The developed task-specific measurement strategies for step height and pitch calibrations with the Centre for Metrology and Accreditation's (MIKES's) metrological AFM are described. The strategies were developed to give high accuracy and to reduce measurement time. Detailed uncertainty estimations for step height and grating pitch calibrations are also given. Standard uncertainties are 0.016 and 0.018 nm for 300 and 700 nm pitch standards, respectively, and 0.21 and 0.44 nm for 7 and 1000 nm step height standards.

Citation Download Citation

Virpi Korpelainen, Jeremias Seppä, and Antti Lassila "Measurement strategies and uncertainty estimations for pitch and step height calibrations by metrological atomic force microscope," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 011002 (28 February 2012). https://doi.org/10.1117/1.JMM.11.1.011002

Published: 28 February 2012

ACCESS THE FULL ARTICLE

INSTITUTIONAL
Select your institution to access the SPIE Digital Library.

SELECT YOUR INSTITUTION

PERSONAL
Sign in with your SPIE account to access your personal subscriptions or to use specific features such as save to my library, sign up for alerts, save searches, etc.

PERSONAL SIGN IN

No SPIE Account? Create one

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available