21 March 2012 Combining micro- and nano-texture to fabricate an antireflective layer
Author Affiliations +
J. of Micro/Nanolithography, MEMS, and MOEMS, 11(1), 013011 (2012). doi:10.1117/1.JMM.11.1.013011
We combined photonic crystal (PC) and nanoporous structures in silicon (Si) to decrease the reflectance of the Si surface. Due to gradual increase of effective refractive index in this structure, reflection is reduced drastically over a broad spectral range. A two-dimensional Si PC was fabricated by interference lithography, then a nanoporous structure was made on the PC by using metal-assisted chemical etching. The obtained reflectance is about 3% across a spectral range of 400 to 2000 nm. This indicates an improvement of reflectance up to 90% compared to bare Si.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Mohammad Malekmohammad, Mohammad Soltanolkotabi, Mohammad H. Naderi, Reza Asadi, Alireza Erfanian, M. Zahedinejad, Mahdi Khaje, Shahin Bagheri, "Combining micro- and nano-texture to fabricate an antireflective layer," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(1), 013011 (21 March 2012). https://doi.org/10.1117/1.JMM.11.1.013011

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