This article [J. Micro/Nanolith. MEMS MOEMS 10, 023005 (2011)] was originally published online on 28 April 2011 with errors in Table 1. The correct data appear below.
Table 1
Zernike polynomials associated with terms 1 to 15 in the Zernike mode spectrum.
| Term No. | , for | Polynomial | pk-pk amplitude | Aberration type |
|---|
| 1 | 0,0 | 1 | — | piston |
| 2 | 1,1 | | 1 | tilt about -axis |
| 3 | | | 1 | tilt about -axis |
| 4 | 2,2 | | 1 | astigmatism |
| 5 | 2,0 | | 2 | defocus |
| 6 | | | 1 | astigmatism |
| 7 | 3,3 | | 1 | trefoil |
| 8 | 3,1 | | 1.63 | coma |
| 9 | | | 1.63 | coma |
| 10 | | | 1 | trefoil |
| 11 | 4,4 | | 1 | quadrafoil |
| 12 | 4,2 | | 1.56 | 2nd astigmatism |
| 13 | 4,0 | | 1.5 | spherical |
| 14 | | | 1.56 | 2nd astigmatism |
| 15 | | | 1 | quadrafoil |
The online version of the article was corrected on 12 January 2012.
