25 May 2012 MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers
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Abstract
New tuneable MOEMS filters have been developed to cover the spectral range from 400 to 750 nm. Compared with previous MEMS based visible light filters, these Fabry-Perot Interferometers (FPIs) have increased transmission (90%), spectral resolution of ∼ 4 to 9 nm, and larger aperture diameter (2 mm), which allows them to be used in spectral imaging devices. We present the fabrication process and characterization of tuneable MOEMS FPIs for central wavelengths of λ = 420  nm and λ = 670  nm. Miniature imaging spectrometers have potential novel applications in diagnostics and health care, bioprocess, and environmental monitoring, process analytical instrumentation, and water-quality analysis.
© 2012 Society of Photo-Optical Instrumentation Engineers (SPIE)
Anna Rissanen, Anna Rissanen, Altti Akujärvi, Altti Akujärvi, Jarkko E. Antila, Jarkko E. Antila, Martti Blomberg, Martti Blomberg, Heikki K. Saari, Heikki K. Saari, } "MOEMS miniature spectrometers using tuneable Fabry-Perot interferometers," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 023003 (25 May 2012). https://doi.org/10.1117/1.JMM.11.2.023003 . Submission:
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