Experimental analysis of pattern line width in digital maskless lithography

Hoonchul Ryoo; Dong Won Kang; Jae W. Hahn; Yo-Tak Song

doi:10.1117/1.JMM.11.2.023004

1 June 2012 Experimental analysis of pattern line width in digital maskless lithography

Hoonchul Ryoo, Dong Won Kang, Jae W. Hahn, Yo-Tak Song

Author Affiliations +

J. of Micro/Nanolithography, MEMS, and MOEMS, 11(2), 023004 (2012). https://doi.org/10.1117/1.JMM.11.2.023004

Abstract

We study the distributions of line/space (L/S) patterns based on exposure dose variation using point array techniques (a type of digital maskless lithography). The intensity distributions of L/S patterns were simulated using the point array technique, and the pattern profiles were obtained by applying the effect of the photoresist contrast to the intensity distribution. As the dose increased, line width also increased. An experiment was performed to verify the simulation results. The minimum line widths of the L/S patterns were about 3.44 and 3.89 μm at laser power levels of 100% and 60%, respectively. The standard deviations of the line widths were 0.28 and 0.03 μm at the 4 and 13 μm L/S patterns, respectively.

Citation Download Citation

Hoonchul Ryoo, Hoonchul Ryoo, Dong Won Kang, Dong Won Kang, Jae W. Hahn, Jae W. Hahn, Yo-Tak Song, Yo-Tak Song, } "Experimental analysis of pattern line width in digital maskless lithography," Journal of Micro/Nanolithography, MEMS, and MOEMS 11(2), 023004 (1 June 2012). https://doi.org/10.1117/1.JMM.11.2.023004 . Submission:

ACCESS THE FULL ARTICLE

PERSONAL SIGN IN
Full access may be available with your subscription

Email or Username Forgot your username?

Password Forgot your password?

Show

Remember Email/Username on this computer

Remember Password

No SPIE account? Create an account
or Institutional Sign In via Shibboleth

PURCHASE THIS CONTENT

SUBSCRIBE TO DIGITAL LIBRARY

50 downloads per 1-year subscription

Members: $195

Non-members: $335 ADD TO CART

25 downloads per 1 - year subscription

Members: $145

Non-members: $250 ADD TO CART

PURCHASE SINGLE ARTICLE

Includes PDF, HTML & Video, when available

Members: $20.00

Non-members: $25.00 ADD TO CART

Show All Keywords

Keywords/Phrases

Search In:

Publication Years